Patent Assignment
Reel/Frame 047254/0018
Assignment of Assignor's Interest
Recorded: 2018-07-31
Pages: 6
Assignors
SEIDEL, DIRK
Executed: 2018-07-10
BLAESING-BANGERT, CAROLA
Executed: 2018-07-16
JAECKEL, OLIVER
Executed: 2018-07-24
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Capturing and Compensating Ambient Effects in a Measuring Microscope