Assignment of Assignor's Interest

Recorded: 2018-10-22 Pages: 6

Assignors

TAN, MARK K.

Executed: 2018-09-14

GOULD, RICHARD H.

Executed: 2018-09-14

BURKHART, CHRISTOPHER WILLIAM

Executed: 2018-10-09

BLANK, RICHARD M.

Executed: 2018-10-09

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Vacuum Robot Positioning System with Reduced Sensitivity to Chamber Pressure

Patent: 10,483,142 →

Application: 16/132,326 →