Patent Assignment
Reel/Frame 047279/0714
Assignment of Assignor's Interest
Recorded: 2018-10-23
Pages: 3
Assignors
STIEPAN, HANS-MICHAEL
Executed: 2017-09-08
HETZLER, JOCHEN
Executed: 2017-09-05
FUCHS, SEBASTIAN
Executed: 2017-09-05
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Test Device and Method for Testing a Mirror