Patent Assignment
Reel/Frame 047290/0801
Assignment of Assignor's Interest
Recorded: 2018-10-24
Pages: 8
Assignors
IWAHATA, SHOTA
Executed: 2018-10-17
HIGUCHI, AYUMI
Executed: 2018-10-17
FUJITA, ERI
Executed: 2018-10-18
FUJITANI, YOSHIYUKI
Executed: 2018-10-24
MANO, MASAKO
Executed: 2018-10-18
TAKEMATSU, YUSUKE
Executed: 2018-10-18
OKUYA, YOSUKE
Executed: 2018-10-18
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Processing Liquid Supplying Apparatus, Substrate Processing Apparatus and Processing Liquid Supplying Method