Patent Assignment
Reel/Frame 047303/0503
Assignment of Assignor's Interest
Recorded: 2018-10-24
Pages: 4
Assignors
SHIGAKI, SHUHEI
Executed: 2018-10-01
YAGUCHI, HIROAKI
Executed: 2018-10-01
NAKAJIMA, MAKOTO
Executed: 2018-10-01
Assignee
NISSAN CHEMICAL CORPORATION
5-1, NIHONBASHI 2-CHOME, CHUO-KU, TOKYO, 1036119, JAPAN
Covered Property
(1)
Planarization Method for a Semiconductor Substrate Using a Silicon-Containing Composition