Patent Assignment
Reel/Frame 047308/0825
Assignment of Assignor's Interest
Recorded: 2018-10-25
Pages: 3
Assignors
INADA, TAKAO
Executed: 2018-10-15
KAWANO, HISASHI
Executed: 2018-10-15
OHNO, HIROKI
Executed: 2018-10-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium