Patent Assignment
Reel/Frame 047318/0593
Assignment of Assignor's Interest
Recorded: 2018-08-31
Pages: 2
Assignor
SATO, YOSHITOMO
Executed: 2018-08-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus