Patent Assignment
Reel/Frame 047367/0374
Assignment of Assignor's Interest
Recorded: 2018-10-31
Pages: 7
Assignors
BEZEL, ILYA
Executed: 2018-07-24
GROSS, KENNETH P.
Executed: 2018-07-24
SZILAGYI, JOHN
Executed: 2018-07-24
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Laser Sustained Plasma Light Source with Forced Flow Through Natural Convection