Patent Assignment
Reel/Frame 047372/0586
Assignment of Assignor's Interest
Recorded: 2018-10-31
Pages: 4
Assignors
CHEN, HSUEH-CHUNG
Executed: 2018-10-30
KELLY, JAMES
Executed: 2018-10-30
MIGNOT, YANN
Executed: 2018-10-30
PEETHALA, CORNELIUS BROWN
Executed: 2018-10-30
CLEVENGER, LAWRENCE A.
Executed: 2018-10-30
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Metal Spacer Self Aligned Double Patterning with Airgap Integration