Patent Assignment
Reel/Frame 047387/0470
Assignment of Assignor's Interest
Recorded: 2018-11-01
Pages: 6
Assignors
GHANTASALA, SATHYENDRA
Executed: 2018-07-02
DOH, HYUN-HO
Executed: 2018-07-02
VENUGOPAL, VIJAYAKUMAR C.
Executed: 2018-10-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatuses for Plasma Chamber Matching and Fault Identification