Patent Assignment
Reel/Frame 047396/0528
Assignment of Assignor's Interest
Recorded: 2018-11-01
Pages: 3
Assignors
MIGNOT, YANN
Executed: 2018-10-31
XU, YONGAN
Executed: 2018-10-31
GLUSCHENKOV, OLEG
Executed: 2018-10-31
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Euv Pattern Transfer with Ion Implantation and Reduced Impact of Resist Residue