Patent Assignment
Reel/Frame 047399/0033
Assignment of Assignor's Interest
Recorded: 2018-11-02
Pages: 3
Assignors
DOLE, NIKHIL
Executed: 2018-10-18
YANAGAWA, TAKUMI
Executed: 2018-10-16
SONG, ANQI
Executed: 2018-10-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Reduction of Sidewall Notching for High Aspect Ratio 3D Nand Etch