Patent Assignment
Reel/Frame 047399/0044
Assignment of Assignor's Interest
Recorded: 2018-11-02
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, and Method and Program for Controlling Elevation of Focus Ring
Application:
16/156,384 →
Publication:
US 2019/0108986