Patent Assignment
Reel/Frame 047400/0249
Assignment of Assignor's Interest
Recorded: 2018-11-02
Pages: 5
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Method and Polishing Apparatus