Patent Assignment
Reel/Frame 047419/0542
Assignment of Assignor's Interest
Recorded: 2018-11-06
Pages: 4
Assignors
ZHAO, JIANPING
Executed: 2018-09-26
VENTZEK, PETER L.G.
Executed: 2018-09-26
LANE, BARTON
Executed: 2018-09-26
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System with Synchronized Signal Modulation