Patent Assignment
Reel/Frame 047422/0840
Assignment of Assignor's Interest
Recorded: 2018-11-06
Pages: 2
Assignor
NOTTBOHM, CHRISTOPH
Executed: 2018-07-31
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Reflective Optical Element and Optical System for Euv Lithography Having Proportions of Substances Which Differ Across a Surface