Patent Assignment
Reel/Frame 047428/0017
Assignment of Assignor's Interest
Recorded: 2018-11-06
Pages: 4
Assignors
CHIU, WEI-CHAO
Executed: 2017-09-27
WANG, CHIH-CHIEN
Executed: 2017-09-27
SHIU, FENG-JIA
Executed: 2017-09-28
KUO, CHING-SEN
Executed: 2017-09-27
CHANG, CHUN-WEI
Executed: 2017-09-27
TZENG, KAI
Executed: 2017-09-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of High-Aspect Ratio Pattern Formation with Submicron Pixel Pitch