Patent Assignment
Reel/Frame 047434/0150
Assignment of Assignor's Interest
Recorded: 2018-11-07
Pages: 4
Assignors
HUANG, SIAO-CHIAN
Executed: 2018-10-30
CHENG, PO-CHUNG
Executed: 2018-11-01
HUANG, CHING-JUINN
Executed: 2018-10-31
FU, TZUNG-CHI
Executed: 2018-10-30
LEE, TSUNG-YEN
Executed: 2018-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Particle Removal Apparatus, Particle Removal System and Particle Removal Method