Patent Assignment
Reel/Frame 047435/0326
Assignment of Assignor's Interest
Recorded: 2018-11-07
Pages: 4
Assignor
KIYOSE, HIROMI
Executed: 2018-10-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Recording Medium