Patent Assignment
Reel/Frame 047440/0936
Assignment of Assignor's Interest
Recorded: 2018-11-07
Pages: 3
Assignors
LI, FU-HSIEN
Executed: 2018-08-30
TUNG, CHI-FENG
Executed: 2018-08-30
SHEN, HSIANG YIN
Executed: 2018-08-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
System for a Semiconductor Fabrication Facility and Method for Operating the Same