Patent Assignment
Reel/Frame 047441/0169
Assignment of Assignor's Interest
Recorded: 2018-11-07
Pages: 3
Assignor
ITOU, SATOSHI
Executed: 2018-11-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus