Patent Assignment
Reel/Frame 047457/0818
Assignment of Assignor's Interest
Recorded: 2018-11-08
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Method, Exposure Apparatus, and Method of Manufacturing Article