Patent Assignment
Reel/Frame 047482/0241
Assignment of Assignor's Interest
Recorded: 2018-11-13
Pages: 6
Assignors
YAMAZAWA, YOHEI
Executed: 2018-10-05
SAITO, TAKEHISA
Executed: 2018-10-05
UDA, MAYO
Executed: 2018-10-05
TOYODA, KEIGO
Executed: 2018-10-05
RANJAN, ALOK
Executed: 2018-09-28
NAKAJIMA, TOSHIKI
Executed: 2018-10-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus