Patent Assignment
Reel/Frame 047484/0629
Assignment of Assignor's Interest
Recorded: 2018-11-13
Pages: 5
Assignors
CHURCH, JENNIFER
Executed: 2018-11-09
DE SILVA, EKMINI A.
Executed: 2018-11-09
GOLDFARB, DARIO
Executed: 2018-11-12
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Graded Hardmask Interlayer for Enhanced Extreme Ultraviolet Performance