Patent Assignment
Reel/Frame 047509/0132
Assignment of Assignor's Interest
Recorded: 2018-11-13
Pages: 3
Assignors
YAMADA, KOHEI
Executed: 2018-11-12
INADOMI, HIROAKI
Executed: 2018-11-12
BIWA, SATOSHI
Executed: 2018-11-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Apparatus and Cleaning Method of Substrate Processing Apparatus