Patent Assignment
Reel/Frame 047540/0888
Assignment of Assignor's Interest
Recorded: 2018-11-19
Pages: 6
Assignors
KITAGAITO, KEIJI
Executed: 2015-10-26
KOBAYASHI, FUMIYA
Executed: 2015-10-21
TOMURA, MAJU
Executed: 2015-10-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method and Plasma Etching Apparatus