Patent Assignment
Reel/Frame 047547/0110
Assignment of Assignor's Interest
Recorded: 2018-11-19
Pages: 3
Assignors
HUANG, CHIEN-HUA
Executed: 2018-10-26
WEI, TZU-HUI
Executed: 2018-10-26
TSAI, CHERNG-SHIAW
Executed: 2018-10-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Selective Removal of an Etching Stop Layer for Improving Overlay Shift Tolerance