Patent Assignment
Reel/Frame 047565/0234
Assignment of Assignor's Interest
Recorded: 2018-11-21
Pages: 3
Assignor
TAPILY, KANDABARA
Executed: 2018-11-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Selective Deposition for Forming Fully Self-Aligned Vias