Patent Assignment
Reel/Frame 047565/0584
Assignment of Assignor's Interest
Recorded: 2018-11-21
Pages: 4
Assignee
USHIO DENKI KABUSHIKI KAISHA
1-6-5, MARUNOUCHI, CHIYODA-KU, TOKYO, 100-8150, JAPAN
Covered Property
(1)
High-Temperature Plasma Raw Material Supply Apparatus and Extreme Ultra Violet Light Source Apparatus