Patent Assignment
Reel/Frame 047579/0891
Assignment of Assignor's Interest
Recorded: 2018-11-26
Pages: 5
Assignors
YOSHIDA, OSAMU
Executed: 2018-10-31
TAMURA, MASAKI
Executed: 2018-10-31
NAGAI, HIDEAKI
Executed: 2018-10-31
Assignee
MIMASU SEMICONDUCTOR INDUSTRY CO., LTD.
2174-1, HODOTA-MACHI, TAKASAKI-SHI, GUNMA, 3703533, JAPAN
Covered Property
(1)
Wafer Heating and Holding Mechanism and Method for Rotary Table, and Wafer Rotating and Holding Device