Patent Assignment
Reel/Frame 047626/0202
Assignment of Assignor's Interest
Recorded: 2018-11-29
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and System for Supplying Chemical Liquid in Semiconductor Fabrication