Patent Assignment
Reel/Frame 047629/0748
Assignment of Assignor's Interest
Recorded: 2018-11-29
Pages: 7
Assignors
YAMAGUCHI, KUNIAKI
Executed: 2018-10-17
XU, HAIYANG
Executed: 2018-10-17
MAEDA, KOJI
Executed: 2018-10-17
INABA, MITSUHIKO
Executed: 2018-10-17
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, CHINA
Covered Property
(1)
Substrate Transport System, Substrate Processing Apparatus, Hand Position Adjustment Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.