Patent Assignment
Reel/Frame 047630/0616
Assignment of Assignor's Interest
Recorded: 2018-11-30
Pages: 5
Assignors
CHEN, YI-SHIUNG
Executed: 2018-10-29
HUANG, CHENG-YI
Executed: 2018-10-29
YANG, CHIH-SHEN
Executed: 2018-10-29
KUO, SHOU-WEN
Executed: 2018-11-08
CHAI, PO-WEN
Executed: 2018-10-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK,, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Gas Tube, Gas Supply System and Manufacturing Method of Semiconductor Device Using the Same