Patent Assignment
Reel/Frame 047679/0080
Assignment of Assignor's Interest
Recorded: 2018-12-05
Pages: 6
Assignors
JDIRA, LUCIAN
Executed: 2018-09-12
TERHORST, HERBERT
Executed: 2018-09-13
TSUJI, NAOTO
Executed: 2018-09-13
SUSA, YOSHIO
Executed: 2018-09-13
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Apparatus for Dispensing a Vapor Phase Reactant to a Reaction Chamber and Related Methods