Patent Assignment
Reel/Frame 047682/0123
Assignment of Assignor's Interest
Recorded: 2018-12-05
Pages: 2
Assignor
YAMAGUCHI, TAKAHIRO
Executed: 2018-11-26
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus