Patent Assignment
Reel/Frame 047697/0292
Assignment of Assignor's Interest
Recorded: 2018-12-06
Pages: 2
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Etching Solution For Selectively Removing Tantalum Nitride Over Titanium Nitride During Manufacture of a Semiconductor Device