Patent Assignment
Reel/Frame 047700/0847
Assignment of Assignor's Interest
Recorded: 2018-12-07
Pages: 5
Assignors
NAOHARA, HIDEJI
Executed: 2018-11-13
KAKUMA, HIROAKI
Executed: 2018-11-13
OKITA, YUJI
Executed: 2018-11-13
MASUI, TATSUYA
Executed: 2018-11-13
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Determination Method and Substrate Processing Equipment