Patent Assignment
Reel/Frame 047701/0723
Assignment of Assignor's Interest
Recorded: 2018-12-07
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method of Forming Conformal Silicon Carbide Film by Cyclic Cvd