Patent Assignment
Reel/Frame 047702/0806
Assignment of Assignor's Interest
Recorded: 2018-12-07
Pages: 4
Assignors
LIU, WEN DAR
Executed: 2018-12-05
LEE, YI-CHIA
Executed: 2018-12-05
ADAMCZYK, ANDREW J.
Executed: 2018-12-04
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Etching Solution for Selectively Removing Silicon-Germanium Alloy From a Silicon-Germanium/Silicon Stack During Manufacture of a Semiconductor Device