Patent Assignment
Reel/Frame 047702/0867
Assignment of Assignor's Interest
Recorded: 2018-12-07
Pages: 3
Assignor
KATSUNUMA, TAKAYUKI
Executed: 2018-12-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Etching Film and Plasma Processing Apparatus