Patent Assignment
Reel/Frame 047703/0908
Assignment of Assignor's Interest
Recorded: 2018-12-07
Pages: 5
Assignors
ZI, AN-REN
Executed: 2018-10-30
LIN, CHIN-HSIANG
Executed: 2018-10-31
CHANG, CHING-YU
Executed: 2018-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Forming Photoresist Pattern