Patent Assignment
Reel/Frame 047711/0208
Assignment of Assignor's Interest
Recorded: 2018-12-07
Pages: 2
Assignors
KUO, CHIA-PANG
Executed: 2018-11-30
LEE, YA-LIEN
Executed: 2018-11-30
SHEN, CHIEH-YI
Executed: 2018-11-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Selective Deposition of Metal Barrier in Damascene Processes