Patent Assignment
Reel/Frame 047725/0010
Assignment of Assignor's Interest
Recorded: 2018-12-10
Pages: 3
Assignor
SUSA, YOSHIO
Executed: 2018-08-22
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Sensor Array, Apparatus for Dispensing a Vapor Phase Reactant to a Reaction Chamber and Related Methods