Patent Assignment
Reel/Frame 047732/0726
Assignment of Assignor's Interest
Recorded: 2018-12-10
Pages: 3
Assignor
WADA, TOSHIHARU
Executed: 2018-12-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Technique for Multi-Patterning Substrates