Patent Assignment
Reel/Frame 047745/0739
Assignment of Assignor's Interest
Recorded: 2018-12-11
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Endpoint Sensor Based Control Including Adjustment of an Edge Ring Parameter for Each Substrate Processed to Maintain Etch Rate Uniformity