Patent Assignment
Reel/Frame 047822/0245
Assignment of Assignor's Interest
Recorded: 2018-12-19
Pages: 8
Assignors
MARUYAMA, TORU
Executed: 2014-09-01
MATSUO, HISANORI
Executed: 2014-09-01
MOTOSHIMA, YASUYUKI
Executed: 2014-09-01
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Method and Polishing Apparatus