Patent Assignment
Reel/Frame 047838/0482
Assignment of Assignor's Interest
Recorded: 2018-12-21
Pages: 2
Assignor
OGASAWARA, MUNEHIRO
Executed: 2018-12-04
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Lithography Apparatus and Charged Particle Beam Pattern Writing Method