Patent Assignment
Reel/Frame 047839/0058
Assignment of Assignor's Interest
Recorded: 2018-12-21
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Operating Substrate Processing Apparatus