Patent Assignment
Reel/Frame 047855/0335
Assignment of Assignor's Interest
Recorded: 2018-12-26
Pages: 7
Assignors
KAJITA, SHINJI
Executed: 2018-11-05
NAKANO, HISAJIRO
Executed: 2018-11-05
ISHIBASHI, TOMOATSU
Executed: 2018-11-05
FUKAYA, KOICHI
Executed: 2018-11-05
MOTOSHIMA, YASUYUKI
Executed: 2018-11-05
ETO, YOHEI
Executed: 2018-11-05
OIKAWA, FUMITOSHI
Executed: 2018-11-05
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Apparatus for Cleaning Substrate and Substrate Cleaning Method