Patent Assignment
Reel/Frame 047888/0249
Assignment of Assignor's Interest
Recorded: 2019-01-03
Pages: 3
Assignor
SVRLUGA, RICHARD C.
Executed: 2018-12-19
Assignee
EXOGENESIS CORPORATION
20 FORTUNE DRIVE, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Method for Ultra-Shallow Etching Using Neutral Beam Processing Based on Gas Cluster Ion Beam Technology
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.